Hafnium Silicide Ep1408541b1

Patent US20040170552 Hafnium silicide …

The present invention relates to a hafnium silicide target for forming a gate oxide film composed of Obtained is a hafnium silicide target superior in ...

Patent EP1408541A4 Hafnium silicide …

A hafnium silicide target for forming a gate oxide film which comprises HfSi; and a method for preparing the hafnium silicide target. The hafnium ...

HAFNIUM SILICIDE TARGET FOR FORMING …

HAFNIUM SILICIDE TARGET FOR FORMING GATE OXIDE FILM AND METHOD FOR PREPARATION THEREOF ... it is preferable that impurities within the hafnium silicide ...

Patent US20090194898 Hafnium Silicide …

Hafnium Silicide Target for Forming Gate Oxide Film, and Method for Preparation Thereof US 20090194898 A1

HAFNIUM SILICIDE TARGET FOR FORMING …

European Patent EP1408541B1 Note: If you have problems viewing the PDF, please make sure you have the latest version of Adobe Acrobat. [ PDF help]

Patent US7674446 Hafnium silicide target …

A hafnium silicide target is provided. The target is used for forming a gate oxide film composed of The target material is superior in workability and ...